A VEC site evaluation for an architectural firm helped make a challenging space work for vibration sensitive semiconductor tools for a new manufacturing program. During the site evaluation, VEC identified several sources of vibration that would be problematic for the planned toolset. These sources included the location within the building and old air handlers and facility support equipment. The VEC engineer worked with the architect to stiffen the floor and provided recommendations to reduce local vibration sources. Also, VEC provided the facilities teams with active isolation system options for their specific toolset.
A semiconductor company is moving vibration sensitive tools into a 50-year-old office building. The end user will use this facility as the core of a new semiconductor manufacturing program. In addition to the challenges of an older building and vibration sensitive semiconductor equipment, the location is on a high floor! For this reason, an architectural firm hired VEC to assess the facility before the move to determine feasibility and make recommendations as required.
VEC conducted a thorough vibration and stiffness survey using both published VC curves and unique manufacturer specifications. The results of this testing provided the client with both a general understanding of the relative vibration level throughout the location and if a specific site worked for a planned tool. To achieve this, VEC collected vibration and stiffness data at over 20 points throughout the 5000 square foot facility.
VEC identified several factors that would impact vibration sensitive semiconductor tools in the facility and challenge the planned manufacturing program. These include:
The project is still ongoing, but the client is on a path towards making this space work for their needs.