Facilities Problem Solving

Identifying and addressing the root cause environmental issues impacting tool performance

Facility support equipment is a common cause of vibration, acoustic noise, and magnetic field problems

Modern laboratories, clean rooms, and semiconductor manufacturing facilities are filled with sources of vibration, acoustic noise, AC electromagnetic fields, and DC electromagnetic fields. Adding further complexity is the frequent movement and addition of new tools and sources that can degrade tool performance. Remediating these issues with isolation tables, acoustic enclosures, and magnetic field cancellation systems can be costly and time consuming if a source is impacting the performance of multiple tools. VEC’s goal is to locate and remediate the sources of vibration, acoustic noise, AC electromagnetic fields, and DC electromagnetic fields as efficiently and cost-effectively as possible by providing the following services:

• Vibration and acoustic noise source identification by matching the vibration or acoustic signature of a source to the vibration or acoustic noise measured at the tool or microscope location

• Identification and reduction of EMI fields through the identification of ground to neutral shorts, miswirings, or other wiring issues in a facility

• Recommendations to eliminate or reduce the impact of vibration, acoustic noise, AC electromagnetic fields, and DC electromagnetic fields

• Product selection consulting for facility support products, vibration isolation tables, acoustic enclosures, EMI cancellation systems, and other products as required