Active Vibration Isolation – Daeil Systems

Electron microscopes and semiconductor processing, metrology, and inspection tools are extremely sensitive to vibration. Depending on the facility, some require the use of active vibration isolation solutions to achieve their specifications.

Daeil Systems has been an innovator in active vibration isolation technology for over 35 years. Their products undergo continuous improvement to keep pace with the increasing resolution and accuracy demands.  At VEC, we are enthusiastic about Daeil Systems’ outstanding track record of performance, dedication to customer support, and unparalleled commitment to quality. All Daeil Systems come with a three-year warranty and are TUV and CE certificated.

Use the chart below to identify the Daeil vibration isolation solution that fits your needs.

ApplicationDVIA Model
Conventional High-Resolution Requirements (<1000kg)
  • Electron and Ion Beam Microscopes
  • Analytical Instruments
DVIA-UB Platform
Ultra-High-Resolution Requirements (<3000kg)
  • Electron and Ion Beam Microscopes
  • Analytical Instruments
DVIA-MB Series
Semiconductor/Display Manufacturing
  • Process Tools
  • Metrology Tools
  • Inspection Tools
DVIA-P Modular Systems

VEC is proud to be the exclusive distributor of the DVIA-M, DVIA-U, and DVIA-P active products in the Americas.  These products are designed specifically to meet the vibration isolation requirements of high-resolution electron microscopy and semiconductor applications.

Contact us to discuss your needs in greater detail and find the active vibration isolation system that will keep your research or processes on track and to specification.

Read our blog post about mitigating vibration in your facility.

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vibration reduction for sensitive instruments