Case Studies

Vibration, magnetic field, and acoustic noise site evaluation

Summary:

A growing semiconductor company in the USA is evaluating a new location for its cleanroom space.  The company wants to ensure that magnetic fields, acoustic noise, and vibration levels will be suitable for their sensitive tools. Vibration Engineering Consultants (VEC) completed a thorough evaluation, during various times of the day, to determine if the proposed space was conducive to the company’s short-term and long-term goals.  Using the data collected, VEC determined that the proposed location was not suitable for sensitive tools and equipment.  This is due to the proximity to a local airport with commercial traffic and power lines adjacent to the location.  VEC then worked with the client to assess and validate a suitable new facility for their cleanroom.

Spot Mode Video enables resolution of image disturbance on an electron microscope image

Summary:

A bioengineering company with a  scanning electron microscope (SEM) was experiencing image disturbance, and VEC was engaged to determine the cause of the image disturbance and either implement or recommend a solution. The frequency of disturbance was tracked to a muffin fan located on the back panel of the Quanta 200.  VEC implemented a temporary solution on site, and provided the client with the necessary data to resolve the problem with the manufacturer.  The temporary solution implemented by VEC significantly improved image quality and provided a clear path towards a permanent solution.

Vibration and stiffness testing is critical for vibration sensitive semiconductor manufacturing equipment

Summary:

A VEC site evaluation for an architectural firm helped make a challenging space work for vibration sensitive semiconductor tools for a new manufacturing program.  During the site evaluation, VEC identified several sources of vibration that would be problematic for the planned toolset.  These sources included the location within the building and old air handlers and facility support equipment.  The VEC engineer worked with the architect to stiffen the floor and provided recommendations to reduce local vibration sources.  Also, VEC provided the facilities teams with active isolation system options for their specific toolset.