DVIA-P Series

Ultimate Active Vibration Isolation System for Semiconductor and Display Processing, Metrology and Inspection Tools

The DVIA-P series is an active pneumatic vibration isolation system specifically designed to control vibrations for advanced semiconductor and display processing, metrology and inspection tools with integrated ultra-precision motorized linear stages. These tools require low-frequency vibration isolation as well as the ultra-fast settling time. The DVIA-P isolators incorporate extremely sensitive sensors and powerful pneumatic actuators, generating enormous force to counteract incoming vibrations from building floors and tools.

Pneumatic Vibration Isolation platform for semiconductor applications with dynamic operations

Optimal Vibration Solution for Metrology Tools with Integrated Linear Stages

Based on the analog input and the acceleration data in real-time, the stage feedforward control system in DVIA-P series effectively compensates residual vibrations caused by motorized linear stages.

When linear stages travel with significant acceleration and mass, large displacement occurs. The acceleration feedback control of DVIA-P Series minimizes the displacement, reducing the settling time, and improving the position accuracy of the system. Furthermore, the DVIA-P can employ the stage feed-forward (SFF) system if VEC connects the analog outputs measuring displacement and acceleration of the stage position to the controller. The SFF system generates a force that is proportional to the stage rotational moment and the stage vibration force, which can reduce the position displacement of the linear stage drastically.

Ultra-Fast Settling Time & Excellent Position Accuracy

The position sensors continuously measure the position of the isolation system and then maintains its position through a digital signal processor. As a result, the sensors significantly improve the position accuracy of the system. Furthermore, accelerometers instantly detect vibrations originating from the floor or the moving stages, then transmit the digital signals to operate pneumatic actuators to cancel out the detected vibration.

DVIA-P Rotational Vibration Response Curves demonstrate outstanding settling time

Powerful Pneumatic Actuators to Support Moving Stage Applications

DVIA-P series is inherently stiffer than a passive vibration isolation system due to the enormous force generated by the pneumatic actuators.  The integrated pneumatic actuators in DVIA-P series create enough force to support the semiconductor/display metrology tools with integrated motorized linear stages.

Superior Vibration Isolation Performance at Low-Frequency

DVIA-P isolators incorporate pneumatic actuators and extremely sensitive sensors with feedforward and feedback control systems to maximize vibration isolation performance in 1 – 10 Hz.

The DVIA-P provides outstanding vibration isolation performance across a wide frequency band

Feedback & Feed-Forward Algorithms

The DVIA-P uses feedback and feedforward algorithms to maximize vibration isolation performance

​(A) Stage Feed-Forward: By collecting information about motorized linear stages in advance, the system can produce a force of equal size to the dynamic linear stage in the opposite direction. As a result, the DVIA-P minimizes the external force caused by the motorized linear stage.

(B) Acceleration Feedback: This feedback control system employs sensors and actuators to continuously detect vibrations which disturb the isolated payload, then reacts to minimize vibrations. The acceleration feedback system not only reduces from the floor but also effectively minimizes vibrations from the motorized linear stages.

​(C) Position Feedback: When the isolated base is disturbed by vibrations, the position feedback measures displacement through position sensors that transmit signals into the digital controller. After receiving the signals from the sensors, the digital controller drives actuators to return its original position, improving the position accuracy.

(D) Floor Feed-Forward: The floor feed-forward system filters the floor vibrations in a predefined way. The DVIA-P utilizes the feed-forward control system when there are known factors such as a force applied to the isolated base.  The data of ambient vibrations and information about equipment that needs to be isolated. Unlike the feedback control system, the feed-forward system analyzes dynamic characteristics of the equipment and tunes the feed-forward gains by the trial and error method to operate the actuators.

Compatibility

For compatibility with other devices, the DVIA-P has LED indications, a power switch, two control switches, a serial interface for adjustment and two analog outputs on the front panel of the controller. The rear panel of the controller has four actuator connectors, analog output connectors, and digital input and output connectors (16 bit).

Vibration Site Survey & Installation

To provide customers with outstanding support, we will send our experienced engineer team to measure all sources of environmental noise. After gathering the vibration data, we analyze the data to design the best vibration isolation system. In general, the DVIA-P series is installed under raised floors in semiconductor fabs, requiring technical expertise. Therefore, our experienced installation and engineer teams take care of the installation and tuning of the isolation system until the customers are satisfied.

Applications

PhotolithographyWafer InspectionFPD Manufacturing
StepperIn-Line InspectionInspection Systems
FPDIn-Line FIB/SEM SystemsPrecision Stepper
Mask AlignersIn-Line AFM SystemsPhoto Lithography
Nanoscale Lithography ToolsX-Ray Inspection Systems
CD-SEM
E-beam Wafer Defect Inspection Systems

Dedication to Quality

All Daeil systems are TUV and CE certified. Both Daeil and VEC provide a one-year warranty on all DVIA-P products.

Daeil Vibration Isolation systems are TUV certified

Daeil Active Vibration Isolation Systems are CE Certified

 

 

 

 

 

 

 

Contact VEC for more information or to request a quotation.

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vibration reduction for sensitive instruments