Overview of strategies to meet the stringent EMI specifications of TEMs, including active magnetic field cancellation systems and passive shielding.

An EMI cancellation system cancels electromagnetic interference (EMI) that degrades electron microscopes performance. Using a sensor, controller, and field canceling loops, the EMI cancellation

DC and AC magnetic fields create electromagnetic interference (EMI) that can degrade the performance of electron microscopes and e-beam lithography tools. Although AC and DC magnetic fields are related, each impacts equipment differently.

Changes in DC magnetic field levels near an electron microscope or e-beam lithography tool degrade image quality and inhibit production. A change in DC fields often results in image distortion, a blurred image, or image drift